Ceramic ESC
Ceramic electrostatic chuck is a product manufactured in accordance with our patent and has excellent withstand voltage characteristics using high purity materials.
| Ceramic ESC | Sintering Ceramic | Coating Ceramic | ||
|---|---|---|---|---|
| Property | Coulomb | Johnson-Rahbeck | High Toughness | Coulomb & Johnson-Rahbeck |
| Color | Ivory | Black | White | White |
| Vacuum | ATM ~ 10E-7 | |||
| Temperature | -20℃ ~ 100℃ | -20℃ ~ 100℃ | -20℃ ~ 80℃ | -20℃ ~ 80℃ |
| Application | Semiconductor | Display | Display & Semiconductor | |